3D MICRO/NANONEEDLE AND 2D FLEXIBLE FILM DEVICES FOR NEURAL INTERFACES

01/30/2020

Takeshi Kawano¹

¹ Toyohashi University of Technology, Toyohashi, Japan

Microscale needle-electrode devices have the advantage of recording high spatiotemporal extracellular signals within the brain tissue. However, the needle’s geometry should be further miniaturised for biocompatibility and chronic application because of tissue damage. This talk introduces a silicon growth technology, which achieves 5-µm-diameter 3D needle-electrode arrays. Subsequent sharpening process to the needle also realizes the nanoscale needle-electrodes for intracellular application. This talk also addresses the other 2D flexible ECoG electrode, which has ultrastretchable property by ‘Kirigami’ design.